说明

• 100μm fork finger electrode ceramic capacitive array gasoline humidity biosensor chip1、Substrate material: alumina ceramic, thickness 0; sort factor: 10mm*10mm, Line width: 100um, Line spacing: 100um, Finger length: 7 of pairs of forked fingers: 12 pairs (24 fingers)、Metal layer structure: Ti/Cu/Ni/Au, thickness: 0, 5μm, 4μm, 1μm respectively、Applicable temperature: -150℃~350℃、Large pads, simpler for experimental operation and observation.

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